Zhongwei Chen's Obituary
In Loving Memory - Dr. Zhongwei Chen (1945 - 2025)
Dr. Zhongwei Chen, a devoted scientist, engineer, and beloved patriarch, passed away peacefully on November 5, 2025, at the age of 81, after courageously facing a long illness.
Born with a deep love of learning and a steadfast moral compass, Dr. Chen dedicated his life to advancing the fields of electron optics and semiconductor inspection equipment. Over the course of his distinguished career, he made significant breakthroughs in both theoretical research and applied engineering. He was widely respected not only as a scientist, but also as an engineer whose work contributed significantly to the progress of his industry.
Dr. Chen was equally committed to nurturing the next generation of scientific talent. Through his research, mentorship, and leadership, he inspired and trained many outstanding individuals who have continued to build upon the foundations he helped establish.
In his personal life, Dr. Chen was known for his integrity, discipline, generosity, and sincerity. He lived with humility and purpose, always ready to help others, and held himself to exceptionally high standards. His character and values will remain a lasting legacy to his family and to all who knew him.
Dr. Chen is survived by his wife, Guofang Du, and his children, Xiaoming, Xiaoliang, and Dazhi, who will forever honor his memory and the example he set.
A memorial and funeral service will be held on:
Sunday, November 16, 2025, at 10:00 AM
at Skylawn Funeral Home
888 Lifemark Road, Half Moon Bay, California.
Family and friends are warmly invited to attend, pay their respects, and celebrate a remarkable life devoted to knowledge, integrity, and love.
What’s your fondest memory of Zhongwei?
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